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prof. C. Strunk
research group
prof. D. Weiss
Clean Room Club (Reimraunseminar)
General information
- We're meeting informally once per week, wednesday 12ct, PHY 8.1.09 (seminar room LS Weiss), to discuss nanofabrication topics.
- Feel free to just drop by whenever you're interested in the announced topic of the week.
- If you want to give a presentation on some topic, also e.g. as starting point for discussion, that's certainly welcome.
Planned, so far unscheduled topics
- 2d material and 1d material transfer techniques
- EBL alignment methods
- Auriga, Supra, Leo system
- Using the probestation for last-minute corrections (scratching)
- Optical lithography
- Dielectric layers: deposition methods etc
Current schedule
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To see the schedule, please follow this link.
Schedule WS 2023/24
| day | topic | discussion lead |
| 24.1.2024 | Pynonic - Python integration for EDraw and Nanonic electron beam lithography | Robin Schock |
| 10.1.2024 | Atomic Layer Deposition (ALD) | ? |
| 20.12.2023 | Focused Ion Beam (FIB) for cutting | Robin Schock |
| 29.11.2023 | Chemically Assisted Ion Beam Etching (CAIBE) | Stefan Peterhans |
| 22.11.2023 | Reactive Ion Etching and similar processes... Making holes, isotropic versus anisotropic, chemical versus physical, deep etching, masks, ... | Simon Feyrer |
| 15.11.2023 | Metallization and lift-off... Thin film deposition methods, how to get the cleanest metal films, adhesion layers, film thickness and deposition speed, combination with resists, undercut, best practices for lift-off procedure, ... | Lea Pfaffinger |
| 8.11.2023 | Resists, resists, resists... E-beam, optical, what is appropriate where, what limits the resolution, developers and strippers, bilayer / multilayer resists, ... | Robin Schock |
| 25.10.2023 | TMDC nanotubes as fabrication help (masks, ...) | Nicola Paradiso |
| 17.10.2023 | Agenda discussion - we're collecting topics for the upcoming weeks. Either be there or send me an e-mail if you want to talk about something. | Andreas K. Hüttel |
Schedule 2016
| day | topic | discussion lead |
| 31.5.2016 | Undercut and lift-off | Martin Decker |
| 24.5.2016 | no meeting | |
| 17.5.2016 | Focussed Ion Beam | Tobias Preis |
| 10.5.2016 | The "clean" in "cleanroom": samples, wafers, ... | Julian Heger |
| 3.5.2016 | Reactive Ion Etching | Karl Götz |
| 26.4.2016 | eLitho / eDraw Tipps und Tricks | Martin Drienovsky |
| 19.4.2016 | Carbon nanotube growth | Michael Schafberger |
| 12.4.2016 | Optical microscopy | Jonathan Eroms |
| 2.2.2016 | Optical lithography | Hubert Maier |
| 26.1.2016 | Agenda discussion - we're collecting topics for the upcoming weeks. Either be there or send me an e-mail if you want to talk about something. | Andreas K. Hüttel |